Wafer carrier (Tray, Cassette, FOSB, FOUP, JAR BOX, MASK CASE...)

Manufacturer web site: http://3sref.com/en/index.php

Comparison of Wafer Handling Equipment

Item	Wafer Tray	Wafer Carrier (FOUP)	Wafer Carrier (FOSB)	Wafer Jar Case
Usage	Workpiece handling and storage during processing	Cleanroom transport and wafer storage	Transport between factories and storage	Transport and storage between factories
Structure	Flat plate structure, minimal protection	Enclosed pod with front opening	Fully enclosed with inner cushion	Fully enclosed structure
Protection Level	Low (vulnerable to external contamination)	High (dust-free, shock-proof)	High (dust, vibration, shock-proof)	High
Automation Compatibility	Manual operation compatible	Automated transport system compatible	Partial automation system compatibility	Compatible with automatic identification
Material	Reinforced plastic, ceramic	High-strength ESD-protected plastic	Reinforced plastic, strengthened buffer materials	Internal reinforced plastic, reinforced design
Usage Environment	For factory settings such as cleaning, drying, and manual work	For cleanroom transportation	For transport between factories	For external storage and transportation
Ease of Movement	Poor	Good	Good	Good
Dust Prevention	Poor	Excellent	Excellent	Very Good
Reusable Cycle Count	Hundreds of times	Over hundreds of cycles	Over hundreds of cycles	Over hundreds of cycles
Cleaning Usage	None	Requires dedicated cleaning equipment	Requires dedicated cleaning equipment	Requires dedicated cleaning equipment
Cost	Low	Medium	High	High
Advantages	Simple structure, high cost-efficiency	Superior wafer protection	Excellent shock absorption and dust prevention	Excellent wafer protection
Disadvantages	Low protection performance	Relatively expensive	Bulky and heavy	Cost of buffer parts is high